Aera Transformer Digital Mass Flow Controller
Versatile MFC that contributes to cost reduction.
The Aera Transformer digital mass flow controllers (MFC) and digital mass flow meters (MFM), suitable for various applications such as CVD, PVD, diffusion, and etching, contribute to your process improvements by achieving excellent flexibility and efficiency, thereby enhancing yield, increasing productivity, and reducing costs. Equipped with new sensor and valve technologies, proven core components in the field, and high-speed digital circuits, they enable precise gas flow control. They boast outstanding reliability, exceptional responsiveness, accuracy, and reproducibility, and offer a versatile range of single gas and multi-gas, multi-range MFCs tailored to the values and functions prioritized by our customers.
- Company：日立Astemo＆ナガノ
- Price：Other
